High-aspect-ratio through-wafer parylene beams for stretchable silicon electronics

T. Zoumpoulidis; M. Bartek; Pascal de Graaf; Rommert Dekker

doi:10.1016/j.sna.2009.03.030

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High-aspect-ratio through-wafer parylene beams for stretchable silicon electronics

T. Zoumpoulidis M. Bartek Pascal de Graaf Rommert Dekker

Year: 2009 Journal: Sensors and Actuators A Physical Vol: 156 (1)Pages: 257-264 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2009.03.030

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Keywords:

Wafer Materials science Parylene Electronics Silicon Stretchable electronics Optoelectronics Nanotechnology Composite material Electrical engineering Engineering Polymer

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Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

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High-aspect-ratio through-wafer parylene beams for stretchable silicon electronics

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