Layer-by-layer self-assembled conductive thin films for MEMS applications

Brian Bush; Guohua Xu; Carlo Carraro; Roya Maboudian

doi:10.1016/j.sna.2005.10.038

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Layer-by-layer self-assembled conductive thin films for MEMS applications

Brian Bush Guohua Xu Carlo Carraro Roya Maboudian

Year: 2005 Journal: Sensors and Actuators A Physical Vol: 126 (1)Pages: 194-200 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2005.10.038

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Keywords:

Layer (electronics) Materials science Microelectromechanical systems Electrical conductor Layer by layer Nanotechnology Thin layer Optoelectronics Composite material

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Polymer Surface Interaction Studies

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Conducting polymers and applications

Physical Sciences → Materials Science → Polymers and Plastics

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Layer-by-layer self-assembled conductive thin films for MEMS applications

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