JOURNAL ARTICLE

Electrical conduction in thin chromium films

El Sayed A. MehannaSigurds ArajsH. F. HelbigR. AidunNagah A. El. Kattan

Year: 1987 Journal:   Journal of Applied Physics Vol: 61 (8)Pages: 4273-4274   Publisher: American Institute of Physics

Abstract

We have prepared thin (50–1500 Å) polycrystalline films of Cr by vacuum (10−8 Torr) evaporation methods using the deposition rate on Corning glass 7059 and its temperature as experimental parameters. Electrical resistivity (ρ) of these films has been studied in situ as a function of temperature (T), film thickness (t), and the above preparation variables. Our films exhibit well-definied anomalies at the Néel temperature which is strongly dominated by internal stresses. The ρ vs T curves are briefly compared with those of other investigators.

Keywords:
Electrical resistivity and conductivity Thin film Torr Materials science Crystallite Vacuum evaporation Vacuum deposition Chromium Electrical conduction Deposition (geology) Analytical Chemistry (journal) Evaporation Thermal conduction Composite material Mineralogy Metallurgy Chemistry Nanotechnology Thermodynamics Electrical engineering Geology Physics

Metrics

16
Cited By
0.89
FWCI (Field Weighted Citation Impact)
11
Refs
0.69
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials

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