High-Frequency Dielectric Measurement Using Non-contact Probe for Dielectric Materials

Abstract

The microwave reflection intensity was measured at room temperature for Cu-plate, Al2O3 and SrTiO3 single crystals as the samples using a non-contact probe as a function of distance between sample and probe. The difference of reflection intensity for Cu-plate, Al2O3 and SrTiO3 single crystals was observed in the region where the distance was 0.2 mm between the sample and probe, and this was caused by the dielectric permittivities of samples. The reflection coefficient of samples was estimated in comparison with the results of electromagnetic simulation using the finite differential time domain method. The reflection intensities of the Cu-plate, Al2O3 and SrTiO3 single crystals were transformed to dielectric permittivity at reflection intensity minimum point.