Silicon micro- and nanostructures formed by femtosecond laser pulses

L. A. Golovan; S. V. Zabotnov; L. A. Ostapenko; Alexander A. Ezhov; M. A. Lastovkina; А. V. Chervyakov; V. Yu. Timoshenko; V. I. Panov; П. К. Кашкаров; G. D. Shandybina

doi:10.1109/cleoe-iqec.2007.4386679

JOURNAL ARTICLE

Silicon micro- and nanostructures formed by femtosecond laser pulses

L. A. Golovan S. V. Zabotnov L. A. Ostapenko Alexander A. Ezhov M. A. Lastovkina А. V. Chervyakov V. Yu. Timoshenko V. I. Panov П. К. Кашкаров G. D. Shandybina

Year: 2007 Vol: 74 Pages: 1-1

DOI: 10.1109/cleoe-iqec.2007.4386679

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Abstract

This paper investigates the silicon surfaces structured by femtosecond laser pulses by the scanning electron microscopy (SEM), atomic-force microscopy (AFM), third-harmonic (TH) generation, photoluminescence (PL), and Raman spectroscopy techniques.

Keywords:

Femtosecond Materials science Silicon Raman spectroscopy Photoluminescence Scanning electron microscope Laser Optoelectronics Nanostructure Microscopy Spectroscopy Atomic force microscopy Optics Nanotechnology Physics

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Ocular and Laser Science Research

Health Sciences → Medicine → Ophthalmology

Silicon micro- and nanostructures formed by femtosecond laser pulses

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