High-temperature ceramic pressure sensor

I. Ayerdi; E. Castaño; A. García‐Alonso; José Gracia

doi:10.1016/s0924-4247(96)01438-0

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High-temperature ceramic pressure sensor

I. Ayerdi E. Castaño A. García‐Alonso José Gracia

Year: 1997 Journal: Sensors and Actuators A Physical Vol: 60 (1-3)Pages: 72-75 Publisher: Elsevier BV

DOI: 10.1016/s0924-4247(96)01438-0

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Keywords:

Materials science Wheatstone bridge Tantalum nitride Tantalum Temperature coefficient Wafer Hysteresis Passivation Sputtering Ceramic Optoelectronics Pressure sensor Silicon nitride Silicon Composite material Bar (unit) Thin film Layer (electronics) Electrical engineering Metallurgy Nanotechnology Voltage Resistor Mechanical engineering Condensed matter physics

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Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Sensor Technologies Research

Physical Sciences → Engineering → Biomedical Engineering

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

High-temperature ceramic pressure sensor

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