JOURNAL ARTICLE
Chemical vapour deposition of tantalum diboride
Year: 1979 Journal: Journal of Materials Science Vol: 14 (12)Pages: 2859-2864 Publisher: Springer Science+Business Media
Keywords:
Tantalum Materials science Impurity Chemical vapor deposition Substrate (aquarium) Analytical Chemistry (journal) Indentation hardness Titanium diboride Chemical composition Boron Metallurgy Nanotechnology Microstructure Chemistry
Metrics
12
Cited By
1.39
FWCI (Field Weighted Citation Impact)
9
Refs
0.78
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Advanced ceramic materials synthesis
Physical Sciences → Materials Science → Ceramics and Composites
Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
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