<title>Scatterometry for machine vision</title>

Abstract

Specifications and design are provided for a low-cost scatterometer build to study the relationship between optical scatter and image formation. Design principles and considerations are discussed as they relate to digital imaging. Specifications and instrument limitations both mechanical and optical are examined and certain design choices are explained. The process of calibrating the instrument is considered and methods of noise suppression both electronic and optical are discussed. Finally, some measured data is presented.