Silicon rich nitride thin films and waveguides

K.N. Andersen; P. C. Nielsen; Winnie Edith Svendsen

doi:10.1364/ipr.2002.itha4

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Silicon rich nitride thin films and waveguides

K.N. Andersen P. C. Nielsen Winnie Edith Svendsen

Year: 2002 Journal: Integrated Photonics Research Pages: IThA4-IThA4

DOI: 10.1364/ipr.2002.itha4

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Abstract

The material properties of silicon rich nitride thin films are presented. Waveguides have been processed with this material as a core layer using LPCVD. The optical loss has been measured in straight waveguides of varying thickness.

Keywords:

Materials science Silicon nitride Silicon Optoelectronics Chemical vapor deposition Nitride Thin film Layer (electronics) Core (optical fiber) Optics Composite material Nanotechnology

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Topics

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Silicon rich nitride thin films and waveguides

Abstract

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