JOURNAL ARTICLE

Copper CMP with Composite Polymer Core - Silica Shell Abrasives: A Defectivity Study

Keywords:
Materials science Chemical-mechanical planarization Composite number Fumed silica Composite material Copper Polymer Slurry Surface roughness Colloidal silica Chemical engineering Polishing Metallurgy

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2
Cited By
0.00
FWCI (Field Weighted Citation Impact)
22
Refs
0.08
Citation Normalized Percentile
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Citation History

Topics

Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Advanced materials and composites
Physical Sciences →  Engineering →  Mechanical Engineering
Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry

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