Copper CMP with Composite Polymer Core - Silica Shell Abrasives: A Defectivity Study

Silvia Armini; Caroline M. Whelan; Mansour Moinpour; Karen Maex

doi:10.1557/proc-1079-n11-04

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Copper CMP with Composite Polymer Core - Silica Shell Abrasives: A Defectivity Study

Silvia Armini Caroline M. Whelan Mansour Moinpour Karen Maex

Year: 2008 Journal: MRS Proceedings Vol: 1079 Publisher: Cambridge University Press

DOI: 10.1557/proc-1079-n11-04

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Keywords:

Materials science Chemical-mechanical planarization Composite number Fumed silica Composite material Copper Polymer Slurry Surface roughness Colloidal silica Chemical engineering Polishing Metallurgy

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Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Advanced materials and composites

Physical Sciences → Engineering → Mechanical Engineering

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Copper CMP with Composite Polymer Core - Silica Shell Abrasives: A Defectivity Study

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