Electromechanical properties of lanthanum-doped lead hafnate titanate thin films for integrated piezoelectric MEMS applications

C. Kügeler; U. Böttger; Theodor Schneller

doi:10.1007/s00339-008-5045-6

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Electromechanical properties of lanthanum-doped lead hafnate titanate thin films for integrated piezoelectric MEMS applications

C. Kügeler U. Böttger Theodor Schneller

Year: 2008 Journal: Applied Physics A Vol: 94 (4)Pages: 739-745 Publisher: Springer Science+Business Media

DOI: 10.1007/s00339-008-5045-6

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Keywords:

Materials science Piezoelectricity Microelectromechanical systems Ferroelectricity Doping Thin film Lanthanum Piezoelectric coefficient Pulsed laser deposition Titanate Deposition (geology) Characterization (materials science) Optoelectronics Nanotechnology Composite material Dielectric Ceramic Inorganic chemistry Chemistry

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Ferroelectric and Piezoelectric Materials

Physical Sciences → Materials Science → Materials Chemistry

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Microwave Dielectric Ceramics Synthesis

Physical Sciences → Engineering → Electrical and Electronic Engineering

Electromechanical properties of lanthanum-doped lead hafnate titanate thin films for integrated piezoelectric MEMS applications

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