Deposition of Diamond-like Carbon Films by Pulsed-Laser Evaporation

Abstract

Diamond-like carbon thin films were deposited by pulsed-laser evaporation. A carbon target was irradiated by a Xe-Cl laser with a power density of 3×10 8 W/cm 2 . Ions were mixed with vaporized atoms. Deposition rates were typically 200 Å/ min. Film properties changed with substrate temperature. The films deposited at 50°C were diamond-like, as confirmed by refractive index (2.1 to 2.2), optical transparenty and chemical resistance. Hydrogen-free films were produced. Optical band gap was 1.4 eV and electrical resistivity was 10 8 Ω-cm. No crystallinity was observed.