&lt;title&gt;Heterodyne moire interferometry in micrometrology&lt;/title&gt;

Yuwen Qin; Chunxia Yan; Xinhua Ji; Guangping Guo

doi:10.1117/12.468843

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<title>Heterodyne moire interferometry in micrometrology</title>

Yuwen Qin Chunxia Yan Xinhua Ji Guangping Guo

Year: 2002 Journal: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Vol: 4537 Pages: 281-284 Publisher: SPIE

DOI: 10.1117/12.468843

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Abstract

By modifying the hardware of a heterodyne moire interferometer (HMI) the measurement range, accuracy and efficiency of the new system can be improved significantly. With this new system, whole-field measurement of displacements and strains can be achieved by translating the photodetectors. Test results have demonstrated that this new HMI system is potentially a good alternative tool for micro-metrology.

Keywords:

Moiré pattern Heterodyne (poetry) Interferometry Metrology Optics Computer science Photodetector Heterodyne detection Physics Electronic engineering Engineering Acoustics

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Advanced Measurement and Metrology Techniques

Physical Sciences → Engineering → Mechanical Engineering

Optical measurement and interference techniques

Physical Sciences → Computer Science → Computer Vision and Pattern Recognition

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

<title>Heterodyne moire interferometry in micrometrology</title>

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