JOURNAL ARTICLE

Optical characterization of silicon nitride films deposited by ECR-CVD

Keywords:
Characterization (materials science) Silicon nitride Nitride Materials science Optoelectronics Nanotechnology Silicon Engineering physics Engineering Layer (electronics)

Metrics

5
Cited By
1.33
FWCI (Field Weighted Citation Impact)
7
Refs
0.80
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Semiconductor materials and interfaces
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
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