Experimental investigation of ablation efficiency and plasma expansion during femtosecond and nanosecond laser ablation of silicon

Xiangbo Zeng; Xianglei Mao; R. Greif; R. E. Russo

doi:10.1007/s00339-004-2963-9

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Experimental investigation of ablation efficiency and plasma expansion during femtosecond and nanosecond laser ablation of silicon

Xiangbo Zeng Xianglei Mao R. Greif R. E. Russo

Year: 2004 Journal: Applied Physics A Vol: 80 (2)Pages: 237-241 Publisher: Springer Science+Business Media

DOI: 10.1007/s00339-004-2963-9

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Keywords:

Femtosecond Laser Plasma Nanosecond Laser ablation Ablation Materials science Silicon X-ray laser Optics Pulse duration Pulsed laser deposition Optoelectronics Laser power scaling Physics

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Laser-induced spectroscopy and plasma

Physical Sciences → Engineering → Mechanics of Materials

Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Ocular and Laser Science Research

Health Sciences → Medicine → Ophthalmology

Experimental investigation of ablation efficiency and plasma expansion during femtosecond and nanosecond laser ablation of silicon

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