Selective ablation of thin films with short and ultrashort laser pulses

Jörg Hermann; M. Benfarah; G. Coustillier; S. Bruneau; Emanuel Axente; Jean‐François Guillemoles; M. Sentís; Anne‐Patricia Alloncle; Tatiana Itina

doi:10.1016/j.apsusc.2005.06.057

JOURNAL ARTICLE

Selective ablation of thin films with short and ultrashort laser pulses

Jörg Hermann M. Benfarah G. Coustillier S. Bruneau Emanuel Axente Jean‐François Guillemoles M. Sentís Anne‐Patricia Alloncle Tatiana Itina

Year: 2005 Journal: Applied Surface Science Vol: 252 (13)Pages: 4814-4818 Publisher: Elsevier BV

DOI: 10.1016/j.apsusc.2005.06.057

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Keywords:

Materials science Laser Ablation Nanosecond Laser ablation Sapphire Optics Optoelectronics Scanning electron microscope X-ray laser Thin film Surface micromachining Ultraviolet Irradiation Laser power scaling Nanotechnology Fabrication Composite material

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Laser Design and Applications

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ocular and Laser Science Research

Health Sciences → Medicine → Ophthalmology

Selective ablation of thin films with short and ultrashort laser pulses

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