JOURNAL ARTICLE
HIGH Tc SUPERCONDUCTING THIN FILMS BY ORGANOMETALLIC CHEMICAL VAPOR DEPOSITION
Year: 1989 Journal: Le Journal de Physique Colloques Vol: 50 (C5)Pages: C5-117 Publisher: EDP Sciences
Keywords:
Chemical vapor deposition Thin film Superconductivity Combustion chemical vapor deposition Materials science Deposition (geology) Group 2 organometallic chemistry Hybrid physical-chemical vapor deposition Chemical engineering Carbon film Chemistry Nanotechnology Condensed matter physics Geology Physics Organic chemistry Molecule Engineering
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Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
Plasma Diagnostics and Applications
Physical Sciences → Engineering → Electrical and Electronic Engineering
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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