JOURNAL ARTICLE

Thermal nanoimprint resist for the fabrication of high-aspect-ratio patterns

Keywords:
Resist Materials science Fabrication Nanoimprint lithography Copolymer Thermal stability Bilayer Polymerization Nanotechnology Chemical engineering Composite material Layer (electronics) Membrane Polymer Chemistry

Metrics

4
Cited By
0.20
FWCI (Field Weighted Citation Impact)
7
Refs
0.53
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Advancements in Photolithography Techniques
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering

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