JOURNAL ARTICLE

Characterization of Nb-doped Pb(Zr,Ti)O3 films deposited on stainless steel and silicon substrates by RF-magnetron sputtering for MEMS applications

Takamichi FujiiYoshikazu HishinumaTsuyoshi MitaTakayuki Naono

Year: 2010 Journal:   Sensors and Actuators A Physical Vol: 163 (1)Pages: 220-225   Publisher: Elsevier BV
Keywords:
Materials science Microelectromechanical systems Silicon Sputter deposition Substrate (aquarium) Wafer Sputtering Optoelectronics Doping Thin film Metallurgy Composite material Cavity magnetron Piezoelectricity Nanotechnology

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40
Cited By
1.09
FWCI (Field Weighted Citation Impact)
22
Refs
0.75
Citation Normalized Percentile
Is in top 1%
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Citation History

Topics

Ferroelectric and Piezoelectric Materials
Physical Sciences →  Materials Science →  Materials Chemistry
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
Photorefractive and Nonlinear Optics
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
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