JOURNAL ARTICLE
Characterization of Nb-doped Pb(Zr,Ti)O3 films deposited on stainless steel and silicon substrates by RF-magnetron sputtering for MEMS applications
Takamichi FujiiYoshikazu HishinumaTsuyoshi MitaTakayuki Naono
Year: 2010 Journal: Sensors and Actuators A Physical Vol: 163 (1)Pages: 220-225 Publisher: Elsevier BV
Keywords:
Materials science Microelectromechanical systems Silicon Sputter deposition Substrate (aquarium) Wafer Sputtering Optoelectronics Doping Thin film Metallurgy Composite material Cavity magnetron Piezoelectricity Nanotechnology
Metrics
40
Cited By
1.09
FWCI (Field Weighted Citation Impact)
22
Refs
0.75
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Ferroelectric and Piezoelectric Materials
Physical Sciences → Materials Science → Materials Chemistry
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
Photorefractive and Nonlinear Optics
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
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