Machine Vision Force Feedback for Electrostatic Microgrippers

Abstract

In this paper we present design considerations and a prototype of a machine vision implemented force feedback system for silicon electrostatic microgrippers. A model of the gripper system is presented and experimentally identified. A tuned PID control system for the gripper's tips opening and gripping force level is presented. The accuracy and the resolution of the system are estimated at levels of 0.250 μΝ and 0.075 μΝ, respectively. Finally, Results of gripping experiments are presented.