iCVD growth of poly(N-vinylimidazole) and poly(N-vinylimidazole-co-N-vinylpyrrolidone)

Guohua Chen; Kenneth K. S. Lau; Karen K. Gleason

doi:10.1016/j.tsf.2009.01.053

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iCVD growth of poly(N-vinylimidazole) and poly(N-vinylimidazole-co-N-vinylpyrrolidone)

Guohua Chen Kenneth K. S. Lau Karen K. Gleason

Year: 2009 Journal: Thin Solid Films Vol: 517 (12)Pages: 3539-3542 Publisher: Elsevier BV

DOI: 10.1016/j.tsf.2009.01.053

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Keywords:

Chemistry Polymer Monomer Polymerization X-ray photoelectron spectroscopy Polymer chemistry Copolymer Fourier transform infrared spectroscopy Imidazole Solvent Chemical engineering Organic chemistry

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Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

iCVD growth of poly(N-vinylimidazole) and poly(N-vinylimidazole-co-N-vinylpyrrolidone)

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