A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining

Lingling Qiao; Fei He; Chen Wang; Ya Cheng; Koji Sugioka; Katsumi Midorikawa

doi:10.1007/s00339-010-6096-z

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A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining

Lingling Qiao Fei He Chen Wang Ya Cheng Koji Sugioka Katsumi Midorikawa

Year: 2010 Journal: Applied Physics A Vol: 102 (1)Pages: 179-183 Publisher: Springer Science+Business Media

DOI: 10.1007/s00339-010-6096-z

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Keywords:

Microlens Femtosecond Surface micromachining Materials science Laser Microfluidics Isotropic etching Lens (geology) Optics Chip Etching (microfabrication) Optoelectronics Nanotechnology Fabrication Layer (electronics) Computer science

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Optical Coherence Tomography Applications

Physical Sciences → Engineering → Biomedical Engineering

Nonlinear Optical Materials Studies

Physical Sciences → Engineering → Biomedical Engineering

A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining

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