Preparation and structure of rare earth transition metal alloy thin films

J.F. Qui; K. Taylor; G.J. Russell

doi:10.1016/0025-5408(93)90009-3

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Preparation and structure of rare earth transition metal alloy thin films

J.F. Qui K. Taylor G.J. Russell

Year: 1993 Journal: Materials Research Bulletin Vol: 28 (1)Pages: 67-71 Publisher: Elsevier BV

DOI: 10.1016/0025-5408(93)90009-3

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Keywords:

Materials science Alloy Thin film Wafer Amorphous solid Sputter deposition Sputtering Silicon Metallurgy Composite material Cavity magnetron Transition metal Carbon film Optoelectronics Nanotechnology Crystallography

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Advanced Materials Characterization Techniques

Physical Sciences → Engineering → Biomedical Engineering

Metallurgical and Alloy Processes

Physical Sciences → Materials Science → General Materials Science

Preparation and structure of rare earth transition metal alloy thin films

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