A novel surface-micromachined capacitive porous silicon humidity sensor

Z. M. Rittersma; Alexandra Splinter; André Bödecker; W. Benecke

doi:10.1016/s0925-4005(00)00431-7

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A novel surface-micromachined capacitive porous silicon humidity sensor

Z. M. Rittersma Alexandra Splinter André Bödecker W. Benecke

Year: 2000 Journal: Sensors and Actuators B Chemical Vol: 68 (1-3)Pages: 210-217 Publisher: Elsevier BV

DOI: 10.1016/s0925-4005(00)00431-7

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Keywords:

Materials science Fabrication Porous silicon Capacitive sensing Silicon Resistor Optoelectronics Capacitor Humidity Layer (electronics) Dielectric Electrode Surface micromachining Porosity Nanotechnology Composite material Electrical engineering Voltage Engineering

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Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

A novel surface-micromachined capacitive porous silicon humidity sensor

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