JOURNAL ARTICLE

A novel surface-micromachined capacitive porous silicon humidity sensor

Z. M. RittersmaAlexandra SplinterAndré BödeckerW. Benecke

Year: 2000 Journal:   Sensors and Actuators B Chemical Vol: 68 (1-3)Pages: 210-217   Publisher: Elsevier BV
Keywords:
Materials science Fabrication Porous silicon Capacitive sensing Silicon Resistor Optoelectronics Capacitor Humidity Layer (electronics) Dielectric Electrode Surface micromachining Porosity Nanotechnology Composite material Electrical engineering Voltage Engineering

Metrics

149
Cited By
4.22
FWCI (Field Weighted Citation Impact)
16
Refs
0.94
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Silicon Nanostructures and Photoluminescence
Physical Sciences →  Materials Science →  Materials Chemistry
Nanowire Synthesis and Applications
Physical Sciences →  Engineering →  Biomedical Engineering
Gas Sensing Nanomaterials and Sensors
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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