Tribological Properties of Tetrahedral Carbon Films Deposited by Filtered Cathodic Vacuum Arc Technique

X. Shi; Beng Kang Tay; D.I. Flynn; Zhen Sun

doi:10.1557/proc-436-293

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Tribological Properties of Tetrahedral Carbon Films Deposited by Filtered Cathodic Vacuum Arc Technique

X. Shi Beng Kang Tay D.I. Flynn Zhen Sun

Year: 1996 Journal: MRS Proceedings Vol: 436 Publisher: Cambridge University Press

DOI: 10.1557/proc-436-293

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Keywords:

Materials science Nanoindenter Vacuum arc Sapphire Carbon fibers Ion Tribology Silicon Composite material Carbon film Thin film Nanoindentation Analytical Chemistry (journal) Metallurgy Nanotechnology Plasma Optics

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Tribological Properties of Tetrahedral Carbon Films Deposited by Filtered Cathodic Vacuum Arc Technique

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