PZT thin films by laser ablation
J. LeeK. R. RamkumarA. SafariS.C. DanforthR. NeifeldRobert PfefferC. Wrenn
Abstract
Lead zirconate titanate (PZT) thin films were deposited by laser ablation using both CO/sub 2/ and excimer lasers. The films were deposited in a vacuum as well as in an oxygen ambient, and the compositions were analyzed by Rutherford backscattering spectrometry and energy dispersive spectroscopy. It was found that the CO/sub 2/ laser which has a long pulselength yields films with excess Pb, whereas the excimer laser which has a characteristically shorter pulselength yields Pb deficient films.< >
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