A New Three-Dimensional Lithography Using Polymer Dispersed Liquid Crystal (PDLC) Films

Abstract

In this paper, we have proposed a new three-dimensional (3-D) lithography using polymer dispersed liquid crystal (PDLC) films. The scattering or transmission rate of ultraviolet (UV) rays through the PDLC film can be continuously controlled by varying the applied voltage across its electrodes. Various slopes and profiles of 3-D photoresist microstructures are easily and effectively fabricated by controlling applied voltages and biasing times of the PDLC film during one UV exposure step of the lithography process.