JOURNAL ARTICLE
An Inertial-Grade, Micromachined Vibrating Beam Accelerometer
T.V. RoszhartH. JermanJ. M. DrakeC. de Cotiis
Year: 2005 Journal: Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 Vol: 2 Pages: 656-658
Keywords:
Accelerometer Beam (structure) Surface micromachining Inertial frame of reference Computer science Acoustics Materials science Physics Optics Fabrication Classical mechanics
Metrics
40
Cited By
4.80
FWCI (Field Weighted Citation Impact)
2
Refs
0.95
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Fiber Optic Sensors
Physical Sciences → Engineering → Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
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