BOOK-CHAPTER

Silicon Nanomachining by Scanning Probe Lithography and Anisotropic Wet Etching

Keywords:
Materials science Silicon Etching (microfabrication) Dry etching Scanning probe microscopy Reactive-ion etching Substrate (aquarium) Optoelectronics Lithography Nanolithography Isotropic etching Nanotechnology Fabrication

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Cited By
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FWCI (Field Weighted Citation Impact)
15
Refs
0.12
Citation Normalized Percentile
Is in top 1%
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Citation History

Topics

Force Microscopy Techniques and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Surface and Thin Film Phenomena
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering

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