BOOK-CHAPTER
Applications and properties of ionized physical vapor deposition films
Year: 2000 Thin films Pages: 141-179 Publisher: Elsevier BV
Keywords:
Microelectronics Physical vapor deposition Spark plug Materials science Vapour deposition Chemical vapor deposition Process (computing) Deposition (geology) Engineering physics Nanotechnology Mechanical engineering Engineering Computer science Thin film
Metrics
3
Cited By
1.08
FWCI (Field Weighted Citation Impact)
35
Refs
0.79
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
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