BOOK-CHAPTER

Applications and properties of ionized physical vapor deposition films

Keywords:
Microelectronics Physical vapor deposition Spark plug Materials science Vapour deposition Chemical vapor deposition Process (computing) Deposition (geology) Engineering physics Nanotechnology Mechanical engineering Engineering Computer science Thin film

Metrics

3
Cited By
1.08
FWCI (Field Weighted Citation Impact)
35
Refs
0.79
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials

Related Documents

JOURNAL ARTICLE

Reactive ionized physical vapor deposition of thin films

S. KonstantinidisR. Snyders

Journal:   Springer Link (Chiba Institute of Technology) Year: 2011
JOURNAL ARTICLE

Reactive ionized physical vapor deposition of thin films

Stéphanos KonstantinidisRony Snyders

Journal:   The European Physical Journal Applied Physics Year: 2011 Vol: 56 (2)Pages: 24002-24002
BOOK-CHAPTER

Ionized Physical Vapor Deposition (IPVD)

Year: 2013 Pages: 1866-1866
JOURNAL ARTICLE

Directional and ionized physical vapor deposition for microelectronics applications

S. M. Rossnagel

Journal:   Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Year: 1998 Vol: 16 (5)Pages: 2585-2608
JOURNAL ARTICLE

Tunable electrical properties of TaNx thin films grown by ionized physical vapor deposition

Miri ChoiCatherine DubourdieuA. J. KellockKam Leung LeeRichard HaightA. PyzynaMartin M. FrankAlexander A. DemkovVijay Narayanan

Journal:   Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena Year: 2014 Vol: 32 (5)
© 2026 ScienceGate Book Chapters — All rights reserved.