BOOK-CHAPTER

MEMS-Based Thin Film and Resonant Chemical Sensors

Harry L. Tuller

Year: 2005 Kluwer international series in electronic materials: science and technology Pages: 3-17   Publisher: Springer Nature
Keywords:
Microelectromechanical systems Materials science Thin film Optoelectronics Nanotechnology Environmental science Engineering physics Engineering

Metrics

5
Cited By
0.00
FWCI (Field Weighted Citation Impact)
30
Refs
0.03
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Gas Sensing Nanomaterials and Sensors
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
Analytical Chemistry and Sensors
Physical Sciences →  Chemical Engineering →  Bioengineering

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