MEMS-Based Thin Film and Resonant Chemical Sensors

BOOK-CHAPTER

Year: 2005 Kluwer international series in electronic materials: science and technology Pages: 3-17 Publisher: Springer Nature

DOI: 10.1007/0-387-23319-9_1

Keywords:

Microelectromechanical systems Materials science Thin film Optoelectronics Nanotechnology Environmental science Engineering physics Engineering

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Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering