Deposition of Plasma Polymer Films by an Atmospheric Pressure Glow Discharge

Rüdiger Foest; F. Sigeneger; Martin Schmidt

doi:10.1007/978-1-4615-0583-9_15

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Deposition of Plasma Polymer Films by an Atmospheric Pressure Glow Discharge

Rüdiger Foest F. Sigeneger Martin Schmidt

Year: 2001 Pages: 113-118

DOI: 10.1007/978-1-4615-0583-9_15

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Keywords:

Atmospheric pressure Dielectric barrier discharge Plasma cleaning Glow discharge Thin film Plasma Atmospheric-pressure plasma Materials science Plasma processing Analytical Chemistry (journal) Nonthermal plasma Deposition (geology) Dielectric Chemistry Optoelectronics Nanotechnology Environmental chemistry

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Plasma Applications and Diagnostics

Health Sciences → Medicine → Radiology, Nuclear Medicine and Imaging

Surface Modification and Superhydrophobicity

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Deposition of Plasma Polymer Films by an Atmospheric Pressure Glow Discharge

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