Transparent ZnO Electrode for Liquid Crystal Displays

Abstract

Preparation of transparent and conductive ZnO filmGa-doped ZnO (GZO) and Al-doped (AZO) films have been widely studied as the most promising transparent conductive films as alternatives to ITO films used in electronics devices such as LCDs, LEDs and solar cells. Magnetron sputtering systemConventional magnetron sputtering systems, planar-and cylindrical-types (Carousel-type), were used to form transparent ZnO thin films.A schematic diagram of the cylindrical-type magnetron sputtering system is shown in Fig. 1 (a).In the cylindrical-type magnetron www.intechopen.com