박막은 Pt/Ti/SiO2/Si 기판 위에 구연산 졸을 이용하여 spin coating에 의해 제작하였다. 기판위에 코팅된 구연산 졸을 380oC에서 15분간 건조시킨 후 750oC에서 10분간 열처리하여 박막을 얻었다. 얻어진 박막은 X-선 회절분석 결과 R3m의 결정구조를 가짐을 알수 있었고, 전기화학적 특성의 측정결과 1차 방전용량은 0.35Ah/cm2-m로 측정되었다. The LiCoO2 thin films were prepared on the Pt/Ti/SiO2/Si substrate by spin coating using citrate sol. The citrate sol was spin-coated on substrate and dried at 380oC for 15 min. to evaporate the solvents and remove the organic materials. The as-deposited films were annealed at 750oC for 10 min. in air for crystallization. The X-ray diffraction patterns for the film have been indexed hexagonal system with space group R3m. The active area of LiCoO2 films for electrochemical test was about 11cm2. A Li foil and 1M LiClO4 in propylene carbonate(PC) and ethylene carbonate(EC) (1:1)were used as an anode and an electrolyte, respectively. The galvanostatic charge-discharge test was carried out at constant current density ranging from 5 A/cm2 in the voltage window between 4.2 and 3.0 V. The first discharge capacity of the film is 0.35Ah/cm2-m. The cycling behavior of the LiCoO2 film is also reported.
Arenst Andreas ArieJin O. SongJoong Kee Lee
Narumi OhtaKazunori TakadaIsao SakaguchiLianqi ZhangRenzhi MaKatsutoshi FukudaMinoru OsadaTakayoshi Sasaki