A high-current electrothermal bistable MEMS relay

Abstract

This paper reports the design, fabrication and testing of a thermally-actuated bistable MEMS relay. Mechanical bistability ensures zero actuation power in both the on and off states, and permits actuation with a transient thermal actuator. In the off state, this relay stands off more than 200 V. In the on state, it exhibits a minimum total resistance of 60 n/spl Omega/ and a maximum current carrying capacity of 3 A. It switches with a maximum 5 Hz rate.