Micro-Electro-Discharge Machining Technologies for MEMS

Abstract

This chapter presented conventional and advanced EDM technologies and discussed their application to MEMS and microdevices enabled by bulk-metal micromachining. Due to its exceptional features and versatility, this technique has great potential for making broad contributions to manufacturing not only mechanical components but also the devices and systems that equip electromechanical functionalities. EDM provides unique opportunities for R&D and manufacturing of such products, as it allows leveraging of non-traditional, high-performance engineering materials with various features such as plasticity, robustness, chemical inertness, and biocompatibility that cannot be achieved through conventional MEMS fabrication processes and their compatible materials. This ability also promotes proper choice of materials that are compatible with particular environments for MEMS fabrication, potentially allowing circumvention of constraints and problems associated with packaging and broadening application opportunities for MEMS. The batch-mode machining approach enabled by the use of lithographically formed electrodes was demonstrated to be a promising means of addressing the essential drawbacks of the traditional serial technique in terms of throughput and tolerance loss, as well as making EDM compatible with conventional MEMS processes based on lithography techniques. In addition, the study on M3EDM revealed that MEMS can be utilized as means to push the limits of EDM and advance the batch-machining technique. These new aspects of EDM suggest that advancing the technique can be an effective way to address the constraints in the range of bulk materials available for MEMS design and manufacturing. The continued development of these new technologies will enable further breakthroughs and innovations in machining systems and MEMS manufacturing.