Control Circuitry for Self-Repairable MEMS Accelerometers

Xingguo Xiong; Yu‐Liang Wu; Wen-Ben Jone

doi:10.1007/978-90-481-3656-8_49

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Control Circuitry for Self-Repairable MEMS Accelerometers

Xingguo Xiong Yu‐Liang Wu Wen-Ben Jone

Year: 2009 Pages: 265-270

DOI: 10.1007/978-90-481-3656-8_49

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Keywords:

Engineering Accelerometer Capacitance Multiplexer Electronic engineering Electrical engineering CMOS Parasitic capacitance Computer science Multiplexing

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Control Circuitry for Self-Repairable MEMS Accelerometers

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