Laser radiometry for the vacuum-ultraviolet spectral range

Abstract

In this presentation, we report on the characterization of a new standard detector for the F/sub 2/ laser radiation at 157 nm and on the results of the first calibrations at 157 nm in nitrogen atmosphere at average power levels close to 1 W. For production control, standardization and safety regulations during testing and production, calibrated radiometers with uncertainties <2% are necessary. Therefore, a vacuum-compatible setup has been established, which also allows measurements in specific atmospheres, under steady pressure or at a specific flow rate.