Proton implanted waveguides in LiNbO3, KNbO3and BaTiO3

P.F. Moretti; P. Thévénard; K. Wirl; P. Hertel; H. Hesse; E. Krätzig; G. Godefroy

doi:10.1080/00150199208015059

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Proton implanted waveguides in LiNbO₃, KNbO₃and BaTiO₃

P.F. Moretti P. Thévénard K. Wirl P. Hertel H. Hesse E. Krätzig G. Godefroy

Year: 1992 Journal: Ferroelectrics Vol: 128 (1)Pages: 13-18 Publisher: Taylor & Francis

DOI: 10.1080/00150199208015059

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Abstract

Abstract By using a Van De Graaf accelerator, planar waveguides in LiNbO3, KNbO3, and BaTiO3 are fabricated (at 300 K) by thermally controlled proton implantation. The waveguide properties are investigated by dark line mode spectroscopy. The reconstructed profiles closely follow the ion concentration profiles as determined by simulation (TRIM).

Keywords:

Materials science Planar Lithium niobate Proton Potassium niobate Line (geometry) Waveguide Optics Ion Spectroscopy Optoelectronics Ferroelectricity Physics Nuclear physics Dielectric

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Proton implanted waveguides in LiNbO₃, KNbO₃and BaTiO₃

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Proton implanted waveguides in LiNbO3, KNbO3and BaTiO3

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