BOOK-CHAPTER
Piezoelectric MEMS: Materials and Devices
Keywords:
Microelectromechanical systems Actuator Chip Transducer Microfluidics Fabrication Engineering Fluidics Electrical engineering Electronic engineering Computer science Nanotechnology Materials science
Metrics
15
Cited By
2.34
FWCI (Field Weighted Citation Impact)
68
Refs
0.89
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
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